Broyd T W, Deaves D M, Oldfield S G
Year:
1983
Bibliographic info:
Semicon/Europa 1983 - Semiconductor Processing and Equipment Symposium, Zurich, Switzerland, March 1983. p324-347. 23 figs, 1 tab, 4 refs.

This paper presents the results of a computational and experimental study to assess the possible benefits of using mathematical modeling techniques for cleanroom design. A two-dimensional modeling visualization has been used for each of the cases studied. This has the advantage that its relative cheapness allows more design variations to be analyzed than would be possible with a three-dimensional method. Full-scale measurements were also taken in the cleanroom which was the subject of the modeling exercise. The predictions of the computational model were found to be in good agreement with the measurements taken.