Influences of fresh air supply locations on temperature distribution of fan filter unit (FFU) type unidirectional cleanrooms

In general, there are 3 locations used for the fresh air supply in a standard cleanroom : under the ceiling of supply air plenum, at the return air shaft, and under the raised floor. In this study, the influences of the three different fresh air supply locations on field velocity and temperature distributions of fan filter unit are investigated then compared. The airflow distribution is simulated by the standard k-e turbulence model. Results are presented and discussed..