Energy saving effect of high-efficiency technologies in industrial cooling plant system

This paper is concerned with energy saving effect of high-efficiency technologies in an industrial cooling plant system. In this paper, the cooling plant system introduced into a semiconductor facility is targeted, and the energy saving effect is studied by simulations. The system has turbo chillers with variable speed drive, heat recovery screw chillers with variable speed drive, assembled cooling towers, and also new control strategies for energy saving. The results of the simulations show that using these high-efficiency technologies can cut down the annual electric power consumption by about 30%.