Improvement in contamination control for a LCD color filter coater was studied by using a mini-environmental design. Different operating conditions of the door and the exhaust of the mini-environment were studied. Measurements of particle concentration flow field, and VOC concentration were performed. Both the particle contamination to the coating process and the VOC contamination to the outside cleanroom environment were considered in this study. lt was found that a minienvironment could be designed to significantly reduce the particle concentration.
Solving IAQ problems requires strategies and tools for making observations and measurements. This article covers the tools a future article will impart strategies for using them.
An experimental method for the determination of the internal diffusion coefficient (D) and partition coefficient (ke) of volatile organic compounds (VOCs) is developed for dry building materials (such as carpet, vinyl flooring. plywood, etc.). The method is used to determine D and k0 for four VOCs (toluene, nonane. decane, and undecane ) through the backing material of a carpet specimen, for four vocs (ethylbenzene, nonane, decane, and undecane) through a floor tile specimen, and three vocs (cyclohexene, ethylbenzene. and decanc) through a plywood specimen.
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