The Measurement of Air Supply Volumes and Velocities in Cleanrooms

Air supply volumes and velocities in cleanrooms are monitored by airflow measuring hoods and anemometers but these measuring methods can be inaccurate if used incorrectly. It is demonstrated in this article that measuring hoods are accurate if the air supply passes evenly out of the hood, as occurs when the air volume is measured from a four-way diffuser or no air supply diffuser. However, when a swirl diffuser was investigated, the measuring hood gave readings more than 50% greater than the true volume. The reasons for the inaccuracy, and methods to correct it were established.