Experimental and CFD Airflow Studies of a Cleanroom with Special Respect to Air Supply Inlets

Investigations were carried out into the airflow in a non-unidirectional airflow cleanroom and its affect on the local airborne particle cleanliness. The main influence was the method of air supply. A supply inlet with no diffuser gave a pronounced downward jet flow and low levels of contamination below it, but poorer than average conditions in much of the rest of the room. A 4-way diffuser gave much better air mixing and a more even airborne particle concentration throughout the cleanroom.